Laser Applications In Microelectronic and Optoelectronic Manufacturing Iii
Published on 1. June 1998
Book
Paperback/Softback
354 pages
978-0-8194-2713-7 (ISBN)
Description
The 37 papers collected in this text examine aspects of laser applications in microelectronic and optoelectronic manufacturing. Topics discussed include processes and diagnostics of laser ablation, methods and tools for laser microfabrication and defect correction.
More details
Language
English
Place of publication
Bellingham
United States
Target group
College/higher education
Professional and scholarly
Illustrations
index
ISBN-13
978-0-8194-2713-7 (9780819427137)
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Schweitzer Classification