Handbook of Microlithography, Micromachining, and Microfabrication: v.2
Published on 20. October 1997
Book
Hardback
700 pages
978-0-85296-911-3 (ISBN)
Description
This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.
More details
Series
Language
English
Place of publication
Stevenage
United Kingdom
Target group
College/higher education
Professional and scholarly
Illustrations
index
Dimensions
Height: 254 mm
Width: 156 mm
ISBN-13
978-0-85296-911-3 (9780852969113)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Content
Micromachining and trends for the 21st century; wet chemical etching of silicon and SiO2; issues in dry etching; plating techniques; high aspect ratio processing; sensors and actuators; micro-optical devices; biomedical devices; smart materials, MEMs and electronics integration.