Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Volume 13
Materials Research Society (Publisher)
Published on 1. February 2000
Book
Hardback
978-1-55899-412-6 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
Warrendale, Pittsburgh
United States
Target group
Professional and scholarly
Illustrations
Worked examples or Exercises
Weight
1227 gr
ISBN-13
978-1-55899-412-6 (9781558994126)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Persons
Editor
Tohoku University, Japan
Kyoto University, Japan