CD-Metrology
Proceedings of the 188. PTB-Seminar, 20. November 2003
1st Edition
Published on 31. January 2005
Book
189 pages
978-3-86509-111-6 (ISBN)
Description
In the end of November 2003 the 188th PTB-Seminar entitled "CD Metrology" took place in conjunction with the 187th PTB-Seminar on "Current Developments in Microscopy". Both oneday seminars were supported by the Helmholtz-Fonds.
The 188th PTB-seminar was intended to bring together experts from industry, science and metrology institutes to discuss about the requirements and recent developments in the metrology of the widths of micro- and nanostructures on masks and wafers, which are used to manufacture integrated circuit devices. This topic is often called CD metrology, where CD is short for critical dimension. About 90 attendees from 10 countries joined the 187th PTB-seminar.
The 188th PTB-seminar was intended to bring together experts from industry, science and metrology institutes to discuss about the requirements and recent developments in the metrology of the widths of micro- and nanostructures on masks and wafers, which are used to manufacture integrated circuit devices. This topic is often called CD metrology, where CD is short for critical dimension. About 90 attendees from 10 countries joined the 187th PTB-seminar.