
In-Situ Patterning:: Volume 158
Selective Area Deposition and Etching
Materials Research Society (Publisher)
Published on 13. July 1990
Book
Hardback
522 pages
978-1-55899-046-3 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
New York
United States
Target group
Professional and scholarly
Product notice
sewn/stitched
Cloth over boards
Illustrations
Worked examples or Exercises
Dimensions
Height: 234 mm
Width: 150 mm
Thickness: 38 mm
Weight
998 gr
ISBN-13
978-1-55899-046-3 (9781558990463)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Persons
Editor
Lawrence Livermore National Laboratory, California
Massachusetts Institute of Technology
IBM T J Watson Research Center, New York