Electronics and Structures For Mems
Bergmann(Author)
SPIE Press
Published on 1. October 1999
Book
Paperback/Softback
428 pages
978-0-8194-3492-0 (ISBN)
Description
A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.
More details
Language
English
Place of publication
Bellingham
United States
Target group
College/higher education
Professional and scholarly
Illustrations
illustrations
ISBN-13
978-0-8194-3492-0 (9780819434920)
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Schweitzer Classification