Sputtering by Particle Bombardment III
Characteristics of Sputtered Particles, Technical Applications
Springer (Publisher)
Published on 1. October 1991
Book
Hardback
410 pages
978-0-387-53428-2 (ISBN)
More details
Series
Language
English
Product notice
sewn/stitched
Cloth over boards
Illustrations
Illustrations
ISBN-13
978-0-387-53428-2 (9780387534282)
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Schweitzer Classification