Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249
Published on 5. October 2010
Book
Hardback
356 pages
978-1-60511-226-8 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
Warrendale, Pittsburgh
United States
Target group
Professional and scholarly
Illustrations
Illustrations
Weight
682 gr
ISBN-13
978-1-60511-226-8 (9781605112268)
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Schweitzer Classification