Ellipsometry and Polarized Light
Elsevier (Publisher)
Published on 1. April 1987
Book
Hardback
558 pages
978-0-444-87016-2 (ISBN)
Description
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory.
More details
Series
Edition
New edition
Language
English
Place of publication
Oxford
United Kingdom
Publishing group
Elsevier Science & Technology
Target group
College/higher education
Professional and scholarly
Edition type
New edition
Dimensions
Height: 230 mm
Width: 150 mm
ISBN-13
978-0-444-87016-2 (9780444870162)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Content
Preface. 1. The polarization of light waves. 2. Propagation of polarized light through polarizing optical systems. 3. Theory and analysis of measurements in ellipsometer systems. 4. Reflection and transmission of polarized light by stratified planar structures. 5. Instrumentation and techniques of ellipsometry. 6. Applications of ellipsometry. Appendix. Author index. Subject index.