§ 1 General Features of Electron Microprobe Analysis.- § 2 Fundamentals of Quantitative Electron Microprobe Analysis.- § 3 Procedures for Correction Calculation.- § 4 Detection Limit, Detection Threshold and Microprobe Trace Analysis.- References.- Annexed Tables.- A) Characteristic Wavelength and Excitation Potentials for K, L, M Series.- B) Determination of Effective Lenard Coefficients.- C) Table of the Electron Penetration Factor.- D) X-Ray Mass Absorption Coefficients.- E) Variation of Effective Electron Current (backscattering factor).- F) Determination of the Efficiency Function 1/f(x).