Surface and Thin Film Analysis

A Compendium of Principles, Instrumentation, and Applications
 
 
Wiley-VCH (Verlag)
2. Auflage | erschienen am 31. März 2011 | 558 Seiten
 
E-Book | PDF mit Adobe DRM | Systemvoraussetzungen
978-3-527-63694-5 (ISBN)
 
Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry.
From a Review of the First Edition (edited by Bubert and Jenett)
'... a useful resource...'
(Journal of the American Chemical Society)
Englisch
Großbritannien
Für Beruf und Forschung
13,80 MB
978-3-527-63694-5 (9783527636945)
3527636943 (3527636943)
weitere Ausgaben werden ermittelt
Gernot Friedbacher is Associate Professor of Analytical Chemistry at the Vienna University of Technology. His research activities are focused on investigation of surfaces and surface processes with scanning probe microscopy and electron probe x-ray microanalysis covering a broad field of applications ranging from basic research on thin film systems to materials science. Over the last decades he has held numerous theoretical and practical courses in the field of analytical chemistry with emphasis on intstrumental analysis and surface- and interface analysis. Prof. Friedbacher has published over 120 research articles, reviews, and book chapters. Henning Bubert worked at the Institut fur Analytische Wissenschaften - ISAS - (Institute for Analytical Sciences) in Dortmund until his retirement in 2003. He is currently working as guest scientist. His research activities are mainly focused on investigation of surfaces and thin films by electron spectroscopy related to the development and application of new materials in mechanical engineering. He has published over 110 research articles, reviews, and book chapters.
Preface to the First Edition XVII Preface to the Second Edition XIX List of Contributors XXI 1 Introduction 1 John C. Riviere and Henning Bubert Part One Electron Detection 7 2 X-Ray Photoelectron Spectroscopy (XPS) 9 Henning Bubert, John C. Riviere, and Wolfgang S.M. Werner 2.1 Principles 9 2.2 Instrumentation 12 2.3 Spectral Information and Chemical Shifts 19 2.4 Quantification, Depth Profiling, and Imaging 21 2.5 The Auger Parameter 27 2.6 Applications 28 2.7 Ultraviolet Photoelectron Spectroscopy (UPS) 38 References 39 3 Auger Electron Spectroscopy (AES) 43 Henning Bubert, John C. Riviere, and Wolfgang S.M. Werner 3.1 Principles 43 3.2 Instrumentation 44 3.3 Spectral Information 47 3.4 Quantification and Depth Profiling 51 3.5 Applications 54 3.6 Scanning Auger Microscopy (SAM) 61 References 64 4 Electron Energy-Loss Spectroscopy (EELS) and Energy-Filtering Transmission Electron Microscopy (EFTEM) 67 Reinhard Schneider 4.1 Principles 68 4.2 Instrumentation 70 4.3 Qualitative Spectral Information 72 4.4 Quantification 83 4.5 Imaging of Element Distribution 85 4.6 Summary 88 References 89 5 Low-Energy Electron Diffraction (LEED) 93 Georg Held 5.1 Principles and History 93 5.2 Instrumentation 94 5.3 Qualitative Information 96 5.4 Quantitative Structural Information 101 5.5 Low-Energy Electron Microscopy 106 References 108 6 Other Electron-Detecting Techniques 111 John C. Riviere 6.1 Ion (Excited) Auger Electron Spectroscopy (IAES) 111 6.2 Ion Neutralization Spectroscopy (INS) 111 6.3 Inelastic Electron Tunneling Spectroscopy (IETS) 112 Reference 113 Part Two Ion Detection 115 7 Static Secondary Ion Mass Spectrometry (SSIMS) 117 Heinrich F. Arlinghaus 7.1 Principles 117 7.2 Instrumentation 119 7.3 Quantification 123 7.4 Spectral Information 125 7.5 Applications 127 References 138 8 Dynamic Secondary Ion Mass Spectrometry (SIMS) 141 Herbert Hutter 8.1 Principles 141 8.2 Instrumentation 143 8.3 Spectral Information 146 8.4 Quantification 147 8.5 Mass Spectra 149 8.6 Depth Profiles 149 8.7 Imaging 152 8.8 Three-Dimensional (3-D)-SIMS 154 8.9 Applications 156 References 159 9 Electron-Impact (EI) Secondary Neutral Mass Spectrometry (SNMS) 161 Michael Kopnarski and Holger Jenett 9.1 Introduction 161 9.2 General Principles of SNMS 162 9.3 Instrumentation and Methods 166 9.4 Spectral Information and Quantification 170 9.5 Element Depth Profiling 172 9.6 Applications 174 References 175 10 Laser Secondary Neutral Mass Spectrometry (Laser-SNMS) 179 Heinrich F. Arlinghaus 10.1 Principles 179 10.2 Instrumentation 182 10.3 Spectral Information 183 10.4 Quantification 183 10.5 Applications 184 References 189 11 Rutherford Backscattering Spectroscopy (RBS) 191 Leopold Palmetshofer 11.1 Introduction 191 11.2 Principles 191 11.3 Instrumentation 194 11.4 Spectral Information 194 11.5 Quantification 196 11.6 Figures of Merit 197 11.7 Applications 198 11.8 Related Techniques 201 References 201 12 Low-Energy Ion Scattering (LEIS) 203 Peter Bauer 12.1 Principles 203 12.2 Instrumentation 206 12.3 LEIS Information 208 12.4 Quantification 211 12.5 Applications of LEIS 211 References 214 13 Elastic Recoil Detection Analysis (ERDA) 217 Oswald Benka 13.1 Introduction 217 13.2 Fundamentals 218 13.3 Particle Identifi cation Methods 220 13.4 Equipment 222 13.5 Data Analysis 223 13.6 Sensitivity and Depth Resolution 223 13.7 Applications 224 References 226 14 Nuclear Reaction Analysis (NRA) 229 Oswald Benka 14.1 Introduction 229 14.2 Principles 231 14.3 Equipment and Depth Resolution 232 14.4 Applications 234 References 236 15 Field Ion Microscopy (FIM) and Atom Probe (AP) 237 Yuri Suchorski and Wolfgang Drachsel 15.1 Introduction 237 15.2 Principles and Instrumentation 239 15.3 Applications 248 References 257 16 Other Ion-Detecting Techniques 261 John C. Riviere 16.1 Desorption Methods 261 16.2 Glow-Discharge Mass Spectroscopy (GD-MS) 263 16.3 Fast-Atom Bombardment Mass Spectroscopy (FABMS) 263 References 264 Part Three Photon Detection 265 17 Total-Reflection X-Ray Fluorescence (TXRF) Analysis 267 Laszlo Fabry, Siegfried Pahlke, and Burkhard Beckhoff 17.1 Principles 267 17.2 Instrumentation 269 17.3 Spectral Information 275 17.4 Quantification 276 17.5 Applications 277 References 288 18 Energy-Dispersive X-Ray Spectroscopy (EDXS) 293 Reinhard Schneider 18.1 Principles 293 18.2 Practical Aspects of X-Ray Microanalysis and Instrumentation 295 18.3 Qualitative Spectral Information 303 18.4 Quantification 304 18.5 Imaging of Element Distribution 306 18.6 Summary 308 References 309 19 Grazing Incidence X-Ray Methods for Near-Surface Structural Studies 311 P. Neil Gibson 19.1 Principles 311 19.2 Experimental Techniques and Data Analysis 317 19.3 Applications 321 References 326 20 Glow Discharge Optical Emission Spectroscopy (GD-OES) 329 Volker Hoffmann and Alfred Quentmeier 20.1 Principles 329 20.2 Instrumentation 330 20.3 Spectral Information 335 20.4 Quantification 336 20.5 Depth Profiling 337 20.6 Applications 339 References 342 21 Surface Analysis by Laser Ablation 345 Roland Hergenroeder and Michail Bolshov 21.1 Introduction 345 21.2 Instrumentation 346 21.3 Depth Profiling 348 21.4 Near-Field Ablation 354 21.5 Conclusion 354 References 355 22 Ion Beam Spectrochemical Analysis (IBSCA) 357 Volker Rupertus 22.1 Principles 357 22.2 Instrumentation 358 22.3 Spectral and Analytical Information 360 22.4 Quantitative Analysis by IBSCA 361 22.5 Applications 363 References 366 23 Reflection Absorption IR Spectroscopy (RAIRS) 367 Karsten Hinrichs 23.1 Instrumentation 367 23.2 Principles 368 23.3 Applications 369 23.4 Related Techniques 374 References 374 24 Surface Raman Spectroscopy 377 Wieland Hill and Bernhard Lendl 24.1 Principles 377 24.2 Surface-Enhanced Raman Scattering (SERS) 378 24.3 Instrumentation 380 24.4 Spectral Information 382 24.5 Quantification 383 24.6 Applications 383 24.7 Nonlinear Optical Spectroscopy 387 References 390 25 UV-VIS-IR Ellipsometry (ELL) 393 Bernd Gruska and Karsten Hinrichs 25.1 Principles 393 25.2 Instrumentation 395 25.3 Applications 398 References 405 26 Sum Frequency Generation (SFG) Spectroscopy 407 Gunther Rupprechter and Athula Bandara 26.1 Introduction to SFG Spectroscopy 407 26.2 SFG Theory 410 26.3 SFG Instrumentation and Operation Modes 414 26.4 Applications of SFG Spectroscopy and Selected Case Studies 417 26.5 Conclusion 430 References 430 27 Other Photon-Detecting Techniques 437 John C. Riviere 27.1 Appearance Potential Methods 437 27.2 Inverse Photoemission Spectroscopy (IPES) and Bremsstrahlung Isochromat Spectroscopy (BIS) 437 Part Four Scanning Probe Microscopy 439 28 Introduction 441 Gernot Friedbacher References 442 29 Atomic Force Microscopy (AFM) 443 Gernot Friedbacher 29.1 Principles 443 29.2 Further Modes of AFM Operation 446 29.3 Instrumentation 452 29.4 Applications 455 References 462 30 Scanning Tunneling Microscopy (STM) 465 Gernot Friedbacher 30.1 Principles 465 30.2 Instrumentation 467 30.3 Lateral and Spectroscopic Information 468 30.4 Applications 470 References 479 31 Scanning Near-Field Optical Microscopy (SNOM) 481 Marc Richter and Volker Deckert 31.1 Introduction 481 31.2 Instrumentation and Operation 482 31.3 SNOM Applications 488 31.4 Outlook 493 References 493 Appendices 499 Appendix A Summary and Comparison of Techniques 501 Appendix B Surface and Thin-Film Analytical Equipment Suppliers 507 Index 519
."..a useful resource..." Journal of the American Chemical Society ..".a useful resource..." Journal of the American Chemical Society -...a useful resource...- Journal of the American Chemical Society "This book is a handy reference work and contains muchuseful information for laboratories specializing in one or a few ofthe techniques; it enables them to compare their methodology withthe many other techniques for surface and thin-filmanalysis." ("Anal Bioanal Chem," 2011)

..".a useful resource..." Journal of the American ChemicalSociety

Dateiformat: PDF
Kopierschutz: Adobe-DRM (Digital Rights Management)

Systemvoraussetzungen:

Computer (Windows; MacOS X; Linux): Installieren Sie bereits vor dem Download die kostenlose Software Adobe Digital Editions (siehe E-Book Hilfe).

Tablet/Smartphone (Android; iOS): Installieren Sie bereits vor dem Download die kostenlose App Adobe Digital Editions (siehe E-Book Hilfe).

E-Book-Reader: Bookeen, Kobo, Pocketbook, Sony, Tolino u.v.a.m. (nicht Kindle)

Das Dateiformat PDF zeigt auf jeder Hardware eine Buchseite stets identisch an. Daher ist eine PDF auch für ein komplexes Layout geeignet, wie es bei Lehr- und Fachbüchern verwendet wird (Bilder, Tabellen, Spalten, Fußnoten). Bei kleinen Displays von E-Readern oder Smartphones sind PDF leider eher nervig, weil zu viel Scrollen notwendig ist. Mit Adobe-DRM wird hier ein "harter" Kopierschutz verwendet. Wenn die notwendigen Voraussetzungen nicht vorliegen, können Sie das E-Book leider nicht öffnen. Daher müssen Sie bereits vor dem Download Ihre Lese-Hardware vorbereiten.

Weitere Informationen finden Sie in unserer E-Book Hilfe.


Download (sofort verfügbar)

164,00 €
inkl. 19% MwSt.
Download / Einzel-Lizenz
PDF mit Adobe DRM
siehe Systemvoraussetzungen
E-Book bestellen