The book "Case Studies in Micromechatronics - From Systems to Process" offers prominent sample applications of micromechatronic systems and the enabling fabrication technologies. The chosen examples represent five main fields of application: consumer electronics (pressure sensor), mobility and navigation (acceleration sensor), handling technology and automation (micro gripper), laboratory diagnostics (point of care system), and biomedical technology (smart skin). These five sample systems are made from different materials requiring a large variety of modern fabrication methods and design rules, which are explained in detail. As a result, an inverted introduction "from prominent applications to base technologies" is provided. Examples of applications are selected to offer a broad overview of the development environment of micromechatronic systems including established as well as cutting-edge microfabrication technologies.
Prof. Dr. Stephanus Büttgenbach is a professor emeritus at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research are silicon micromachining, quartz technology, MEMS-CAD, microactuators, microsensors, lab-on-chip systems, and microreactors.
Prof. Dr. Iordania Constantinou is a junior professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her fields of research include amorphous semiconductors, organic electronics, micro- and nanosensors, and microfluidics.
Prof. Dr. Andreas Dietzel is a professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research include systems in foil, laser microstructuring, point-of-care systems, MagMEMS, MEMS simulation, and the design and fabrication of microfluidic systems with application in life sciences.
Dr.-Ing. Monika Leester-Schädel is an academic senior councilor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her special fields of work are micromechatronics, sensor systems for aerospace, and microactuators.
Introduction.- Example 1: Piezoresistive pressure sensor.- Example 2: Surface micromachined acceleration sensor.- Example 3: Pneumatically actuated microgrippers.- Example 4: Point-of-care system for detection of C-reactive protein.- Example 5: Smart skin.- Glossary.- References.- Index.